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MEMS packaging and integration for miniaturized sensor nodes

dc.contributor.authorBaert, Kris
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-16T00:43:31Z
dc.date.available2021-10-16T00:43:31Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10046
dc.sourceIIOimport
dc.titleMEMS packaging and integration for miniaturized sensor nodes
dc.typeOral presentation
dc.contributor.imecauthorVan Hoof, Chris
dc.source.peerreviewno
dc.source.conferenceMEMS Executive meeting
dc.source.conferencedate20/06/2005
dc.source.conferencelocationCassis France
imec.availabilityPublished - imec


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