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Stress Migration in Submicron Metal Lines

dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-09-29T13:26:18Z
dc.date.available2021-09-29T13:26:18Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1021
dc.sourceIIOimport
dc.titleStress Migration in Submicron Metal Lines
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conferenceWorkshop on the Early Resistance Change Technique; March 30-31,1995; Diepenbeek, Belgium.
dc.source.conferencelocation
imec.availabilityPublished - imec


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