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Selective airgaps: towards a scalable lowk solution

dc.contributor.authorGueneau de Mussy, Jean Paul
dc.contributor.authorBeyer, Gerald
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-16T01:51:10Z
dc.date.available2021-10-16T01:51:10Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10532
dc.sourceIIOimport
dc.titleSelective airgaps: towards a scalable lowk solution
dc.typeBook chapter
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage77
dc.source.bookMaterials for Information Technology: Devices, Interconnects and Packaging
dc.source.endpage84
imec.availabilityPublished - imec
imec.internalnotesEngineering Materials and Processes


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