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TXRF saturation effects in atomic contamination analysis for advanced micro-electronic devices

dc.contributor.authorHellin, David
dc.date.accessioned2021-10-16T01:57:25Z
dc.date.available2021-10-16T01:57:25Z
dc.date.issued2005-03
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10560
dc.sourceIIOimport
dc.titleTXRF saturation effects in atomic contamination analysis for advanced micro-electronic devices
dc.typePHD thesis
dc.contributor.imecauthorHellin, David
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorVinckier, Chris
dc.contributor.thesisadvisorDe Gendt, Stefan
imec.availabilityPublished - open access


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