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Influence of vacuum environment in conductive AFM measurements on advanced MOS gate dielectrics

dc.contributor.authorAguilera, Lidia
dc.contributor.authorPolspoel, Wouter
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorNafria, Montserrat
dc.contributor.authorAymerich, Xavier
dc.date.accessioned2021-10-16T15:00:16Z
dc.date.available2021-10-16T15:00:16Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11632
dc.sourceIIOimport
dc.titleInfluence of vacuum environment in conductive AFM measurements on advanced MOS gate dielectrics
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferenceTrends in Nanotechnology conference - TNT 2007
dc.source.conferencedate3/09/2007
dc.source.conferencelocationSan Sebastian Spain
imec.availabilityPublished - imec


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