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Scanning spreading resistance microscopy for the characterization of advanced silicon devices

dc.contributor.authorAlvarez, David
dc.date.accessioned2021-10-16T15:00:28Z
dc.date.available2021-10-16T15:00:28Z
dc.date.issued2007-01
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11642
dc.sourceIIOimport
dc.titleScanning spreading resistance microscopy for the characterization of advanced silicon devices
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorVandervorst, Wilfried
imec.availabilityPublished - open access


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