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Dielectric films for advanced microelectronics

dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorGreen, Martin
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-16T15:01:57Z
dc.date.available2021-10-16T15:01:57Z
dc.date.issued2007
dc.identifier.isbn978-0-470-013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11683
dc.sourceIIOimport
dc.titleDielectric films for advanced microelectronics
dc.typeBook
dc.contributor.imecauthorMaex, Karen
dc.source.numberofpages486
dc.source.peerreviewno
imec.availabilityPublished - imec


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