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Characterization and testing methods for MEMS reliability

dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-16T15:38:35Z
dc.date.available2021-10-16T15:38:35Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12002
dc.sourceIIOimport
dc.titleCharacterization and testing methods for MEMS reliability
dc.typeOral presentation
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.conferenceTransducers
dc.source.conferencedate10/06/2007
dc.source.conferencelocationLyon France
imec.availabilityPublished - imec
imec.internalnotesCourse


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