Show simple item record

Spin-on wafer contamination evaluated with TXRF and SIMS

dc.contributor.authorErhke, Hans Ulrich
dc.contributor.authorSears, Adam
dc.contributor.authorGreithanner, Stefan
dc.contributor.authorVan Hoeymissen, Jan
dc.contributor.authorRip, Jens
dc.date.accessioned2021-10-16T16:02:00Z
dc.date.available2021-10-16T16:02:00Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12129
dc.sourceIIOimport
dc.titleSpin-on wafer contamination evaluated with TXRF and SIMS
dc.typeOral presentation
dc.contributor.imecauthorRip, Jens
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conference12th Conference on Total Reflection X-Ray Fluorescence Analysis and Related Methods - TXRF
dc.source.conferencedate18/06/2008
dc.source.conferencelocationTrento Italy
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
16080.pdf
Size:
422.4Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record