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Building blocks for 32nm IC manufacturing

dc.contributor.authorAbsil, Philippe
dc.date.accessioned2021-10-17T06:13:14Z
dc.date.available2021-10-17T06:13:14Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13278
dc.sourceIIOimport
dc.titleBuilding blocks for 32nm IC manufacturing
dc.typeOral presentation
dc.contributor.imecauthorAbsil, Philippe
dc.source.peerreviewno
dc.source.conferenceApplied Materials Technical Forum Asia
dc.source.conferencedate7/11/2008
dc.source.conferencelocationHsinchu Taiwan
imec.availabilityPublished - imec


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