3D integration
| dc.contributor.author | Beyne, Eric | |
| dc.date.accessioned | 2021-10-17T06:17:43Z | |
| dc.date.available | 2021-10-17T06:17:43Z | |
| dc.date.issued | 2008 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13382 | |
| dc.source | IIOimport | |
| dc.title | 3D integration | |
| dc.type | Oral presentation | |
| dc.contributor.imecauthor | Beyne, Eric | |
| dc.contributor.orcidimec | Beyne, Eric::0000-0002-3096-050X | |
| dc.source.peerreview | no | |
| dc.source.conference | DATE Conference | |
| dc.source.conferencedate | 14/03/2008 | |
| dc.source.conferencelocation | München Germany | |
| imec.availability | Published - imec | |
| imec.internalnotes | Workshop 3, Heterogeneous System Integration : from MEMS to NEMS |
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