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3D integration technologies at IMEC

dc.contributor.authorBeyne, Eric
dc.date.accessioned2021-10-17T06:18:04Z
dc.date.available2021-10-17T06:18:04Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13388
dc.sourceIIOimport
dc.title3D integration technologies at IMEC
dc.typeBook chapter
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.source.peerreviewno
dc.source.beginpage413
dc.source.bookHandbook of 3D Integration: Technology Applications of RD Integrated Circuits
dc.source.endpage430
imec.availabilityPublished - imec


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