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Fabrication and characterization of SOI multi gate field effect transistors with high-k dielectrics and metal gates

dc.contributor.authorFerain, Isabelle
dc.date.accessioned2021-10-17T07:05:19Z
dc.date.available2021-10-17T07:05:19Z
dc.date.issued2008-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13719
dc.sourceIIOimport
dc.titleFabrication and characterization of SOI multi gate field effect transistors with high-k dielectrics and metal gates
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorDe Meyer, Kristin
imec.availabilityPublished - open access


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