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Recent Results from Imec on Hydrogen Passivation

dc.contributor.authorEl Gamel, Hussam
dc.contributor.authorNijs, Johan
dc.contributor.authorMertens, Robert
dc.date.accessioned2021-09-29T12:41:01Z
dc.date.available2021-09-29T12:41:01Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/142
dc.sourceIIOimport
dc.titleRecent Results from Imec on Hydrogen Passivation
dc.typeOral presentation
dc.contributor.imecauthorMertens, Robert
dc.source.peerreviewno
dc.source.conference4th Workshop on the Role of Point Defects / Defect Complexes in Silicon Device Processing; 1994; USA.
imec.availabilityPublished - imec


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