Contamination control in submicron CMOS technologies
| dc.contributor.author | Rotondaro, Antonio | |
| dc.date.accessioned | 2021-09-29T15:19:21Z | |
| dc.date.available | 2021-09-29T15:19:21Z | |
| dc.date.issued | 1996-01 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/1437 | |
| dc.source | IIOimport | |
| dc.title | Contamination control in submicron CMOS technologies | |
| dc.type | PHD thesis | |
| dc.source.peerreview | no | |
| imec.availability | Published - imec | |
| imec.internalnotes | Thesis advisors : Prof. Dr. Ir. C. Claeys and Prof. Dr. Ir. G. Declerck |
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