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Electro static discharge in MEMS: sensitivity and protection

dc.contributor.authorSangameswaran, Sandeep
dc.date.accessioned2021-10-17T10:25:20Z
dc.date.available2021-10-17T10:25:20Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14416
dc.sourceIIOimport
dc.titleElectro static discharge in MEMS: sensitivity and protection
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conferenceIMEC Annual PhD Days
dc.source.conferencedate17/11/2008
dc.source.conferencelocationHeverlee Belgium
imec.availabilityPublished - imec


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