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Stacking and interconnection of ICs in the 3rd dimension

dc.contributor.authorSwinnen, Bart
dc.date.accessioned2021-10-17T11:05:42Z
dc.date.available2021-10-17T11:05:42Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14527
dc.sourceIIOimport
dc.titleStacking and interconnection of ICs in the 3rd dimension
dc.typeOral presentation
dc.contributor.imecauthorSwinnen, Bart
dc.source.peerreviewno
dc.source.conference9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS
dc.source.conferencedate21/09/2008
dc.source.conferencelocationBrugge Belgium
imec.availabilityPublished - imec
imec.internalnotesSHORT COURSE


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