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Charge carrier mobility for advanced high-k/metal gate MOSFET in CMOS technology. An experimental study

dc.contributor.authorTrojman, Lionel
dc.date.accessioned2021-10-18T03:43:25Z
dc.date.available2021-10-18T03:43:25Z
dc.date.issued2009-11
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16323
dc.sourceIIOimport
dc.titleCharge carrier mobility for advanced high-k/metal gate MOSFET in CMOS technology. An experimental study
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorGroeseneken, Guido
dc.contributor.thesisadvisorMaes, Herman
imec.availabilityPublished - open access


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