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Local oxidation of silicon and titanium surfaces with a scanning probe microsope

dc.contributor.authorVullers, R. J. M.
dc.contributor.authorDaniels, H.
dc.contributor.authorMaenhoudt, Mireille
dc.contributor.authorVan Haesendonck, Chris
dc.contributor.authorVan Hove, Marleen
dc.date.accessioned2021-09-29T15:50:26Z
dc.date.available2021-09-29T15:50:26Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1642
dc.sourceIIOimport
dc.titleLocal oxidation of silicon and titanium surfaces with a scanning probe microsope
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conferenceMeeting Belgische Natuurkundige Vereniging; June 6, 1996; Brussel, Belgium.
dc.source.conferencelocation
imec.availabilityPublished - imec


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