Show simple item record

Study and characterization of thin indium-nickel membranes for MEMS encapsulation at temperatures below 200°C

dc.contributor.authorHellin Rico, Raquel
dc.date.accessioned2021-10-18T16:58:17Z
dc.date.available2021-10-18T16:58:17Z
dc.date.issued2010-02
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17241
dc.sourceIIOimport
dc.titleStudy and characterization of thin indium-nickel membranes for MEMS encapsulation at temperatures below 200°C
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorCelis, Jean-Pierre
dc.contributor.thesisadvisorVan Hoof, Chris
imec.availabilityPublished - imec


Files in this item

Thumbnail
Name:
21888.pdf
Size:
9.028Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record