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Elastic recoil detection of hydrogen in combination with low energy argon sputtering

dc.contributor.authorBrijs, Bert
dc.contributor.authorDeleu, Jeroen
dc.contributor.authorVan Beeck, W.
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-09-30T07:59:01Z
dc.date.available2021-09-30T07:59:01Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1759
dc.sourceIIOimport
dc.titleElastic recoil detection of hydrogen in combination with low energy argon sputtering
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferenceIon Beam Analysis-13; 27 July - 1 August 1997; Lisboa, Portugal.
dc.source.conferencelocation
imec.availabilityPublished - imec


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