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Ultra-low copper baths for sub-35nm copper interconnects

dc.contributor.authorAtanasova, Tanya
dc.date.accessioned2021-10-19T12:30:02Z
dc.date.available2021-10-19T12:30:02Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18498
dc.sourceIIOimport
dc.titleUltra-low copper baths for sub-35nm copper interconnects
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conferenceIMEC PhD Conference Fun in Research
dc.source.conferencedate22/11/2011
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - imec


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