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Integration of carbon nanotubes as future interconnections for sub-32nm technologies

dc.contributor.authorChiodarelli, Nicolo
dc.date.accessioned2021-10-19T12:48:03Z
dc.date.available2021-10-19T12:48:03Z
dc.date.issued2011-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18683
dc.sourceIIOimport
dc.titleIntegration of carbon nanotubes as future interconnections for sub-32nm technologies
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorGroeseneken, Guido
dc.contributor.thesisadvisorHeyns, Marc
imec.availabilityPublished - open access


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