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Atomic layer deposition: nucleation and surface preparation

dc.contributor.authorDelabie, Annelies
dc.date.accessioned2021-10-19T13:12:05Z
dc.date.available2021-10-19T13:12:05Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18822
dc.sourceIIOimport
dc.titleAtomic layer deposition: nucleation and surface preparation
dc.typeOral presentation
dc.contributor.imecauthorDelabie, Annelies
dc.source.peerreviewno
dc.source.conferenceENHANCE-Winter School
dc.source.conferencedate25/01/2011
dc.source.conferencelocationBochum Germany
imec.availabilityPublished - imec


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