Show simple item record

Direct CMP of high porosity ultra low-k materials

dc.contributor.authorHeylen, Nancy
dc.date.accessioned2021-10-19T14:18:29Z
dc.date.available2021-10-19T14:18:29Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19074
dc.sourceIIOimport
dc.titleDirect CMP of high porosity ultra low-k materials
dc.typeOral presentation
dc.contributor.imecauthorHeylen, Nancy
dc.source.peerreviewno
dc.source.conferenceAdvanced Metallization Conference 21st Asian Session - ADMETA
dc.source.conferencedate12/09/2011
dc.source.conferencelocationTokyo Japan
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record