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Creep in MEMS. Failures in MEMS due to creep, plasticity and processing-microstructures-temperatures related mechanisms

dc.contributor.authorModlinski, Robert
dc.date.accessioned2021-10-19T16:26:38Z
dc.date.available2021-10-19T16:26:38Z
dc.date.issued2011-01
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19443
dc.sourceIIOimport
dc.titleCreep in MEMS. Failures in MEMS due to creep, plasticity and processing-microstructures-temperatures related mechanisms
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorPuers, Bob
dc.contributor.thesisadvisorMertens, Robert
imec.availabilityPublished - open access


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