| dc.contributor.author | Pobedinskas, P. | |
| dc.contributor.author | Mortet, V. | |
| dc.contributor.author | Haenen, Ken | |
| dc.date.accessioned | 2021-10-19T17:23:41Z | |
| dc.date.available | 2021-10-19T17:23:41Z | |
| dc.date.issued | 2011 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19583 | |
| dc.source | IIOimport | |
| dc.title | Thickness dependent frequency and lifetime behaviour of optical phonons in thin AlN films | |
| dc.type | Oral presentation | |
| dc.contributor.imecauthor | Haenen, Ken | |
| dc.contributor.orcidimec | Haenen, Ken::0000-0001-6711-7367 | |
| dc.source.peerreview | no | |
| dc.source.conference | Innovations in Thin Films Processing and Characterization & Magnetron, Ion Processing and Arc Technologies - ITFPC & MIATEC | |
| dc.source.conferencedate | 14/11/2011 | |
| dc.source.conferencelocation | Viles-les-Nancy France | |
| imec.availability | Published - imec | |