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MEMS SiGE platform and applications

dc.contributor.authorSeveri, Simone
dc.date.accessioned2021-10-20T15:59:26Z
dc.date.available2021-10-20T15:59:26Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21491
dc.sourceIIOimport
dc.titleMEMS SiGE platform and applications
dc.typeOral presentation
dc.contributor.imecauthorSeveri, Simone
dc.source.peerreviewno
dc.source.conference2nd International Symposium on Integrated Microsystems - ISIM
dc.source.conferencedate13/02/2012
dc.source.conferencelocationTsukuba Japan
imec.availabilityPublished - imec


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