Show simple item record

Dopant profiling in semiconductors with SIMS

dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-20T18:00:44Z
dc.date.available2021-10-20T18:00:44Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21738
dc.sourceIIOimport
dc.titleDopant profiling in semiconductors with SIMS
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conference14th Topical Conference on Quantitative Surface Analysis
dc.source.conferencedate28/10/2012
dc.source.conferencelocationTampa, FL USA
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
26624.pdf
Size:
13.72Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record