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Probing dopant, carrier and impurity distributions in small 3D-structures and confined volumes with SIMS, Atomprobe Tomography, SSRM and C-AFM

dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-20T18:01:59Z
dc.date.available2021-10-20T18:01:59Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21741
dc.sourceIIOimport
dc.titleProbing dopant, carrier and impurity distributions in small 3D-structures and confined volumes with SIMS, Atomprobe Tomography, SSRM and C-AFM
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferenceSmall Volume Analysis
dc.source.conferencedate17/09/2012
dc.source.conferencelocationPortland, OR USA
imec.availabilityPublished - imec


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