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Contacting advanced CMOS devices by local interconnects

dc.contributor.authorDemuynck, Steven
dc.date.accessioned2021-10-21T07:17:00Z
dc.date.available2021-10-21T07:17:00Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22252
dc.sourceIIOimport
dc.titleContacting advanced CMOS devices by local interconnects
dc.typeOral presentation
dc.contributor.imecauthorDemuynck, Steven
dc.source.peerreviewno
dc.source.conferenceChina Semiconductor Technology International Conference - CSTIC
dc.source.conferencedate17/03/2013
dc.source.conferencelocationShanghai China
imec.availabilityPublished - imec


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