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IMP liners for all speed fill

dc.contributor.authorBeyer, Gerald
dc.contributor.authorMaex, Karen
dc.contributor.authorDaniels, Stephen
dc.contributor.authorMaity, Nirmalya
dc.contributor.authorBassanini, Davide
dc.date.accessioned2021-09-30T11:28:10Z
dc.date.available2021-09-30T11:28:10Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2395
dc.sourceIIOimport
dc.titleIMP liners for all speed fill
dc.typeOral presentation
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.conferenceAdvanced Metallization Conference; 6-8 Oct. 1998; Colorado Springs, USA.
dc.source.conferencelocation
imec.availabilityPublished - imec


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