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Surface preparation of III-V materials for advanced CMOS processing

dc.contributor.authorvan Dorp, Dennis
dc.date.accessioned2021-10-22T07:08:07Z
dc.date.available2021-10-22T07:08:07Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24685
dc.sourceIIOimport
dc.titleSurface preparation of III-V materials for advanced CMOS processing
dc.typeOral presentation
dc.contributor.imecauthorvan Dorp, Dennis
dc.contributor.orcidimecvan Dorp, Dennis::0000-0002-1085-4232
dc.source.peerreviewno
dc.source.conferenceImec Symposium: Advanced Cleaning and Surface Preparation
dc.source.conferencedate28/04/2014
dc.source.conferencelocationBrussels Belgium
imec.availabilityPublished - imec


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