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Two-dimensional carrier profiling of semiconductor structures with nanometer resolution

dc.contributor.authorDe Wolf, Peter
dc.date.accessioned2021-09-30T11:45:36Z
dc.date.available2021-09-30T11:45:36Z
dc.date.issued1998-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2514
dc.sourceIIOimport
dc.titleTwo-dimensional carrier profiling of semiconductor structures with nanometer resolution
dc.typePHD thesis
dc.source.peerreviewno
imec.availabilityPublished - imec
imec.internalnotesThesis Advisors : Prof. Dr. Ir. W. Vandervorst and Prof. Dr. Ir. L. Hellemans


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