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Wrinkled B-NCD pressure sensing membranes: a mismatch in thermal expension coefficients dertermines the sensitivity

dc.contributor.authorDrijkoningen, Sien
dc.contributor.authorJanssens, Stoffel D.
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-22T19:05:54Z
dc.date.available2021-10-22T19:05:54Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25226
dc.sourceIIOimport
dc.titleWrinkled B-NCD pressure sensing membranes: a mismatch in thermal expension coefficients dertermines the sensitivity
dc.typeOral presentation
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewno
dc.source.conferenceHasselt diamond Workshop - SBDD XX
dc.source.conferencedate25/02/2015
dc.source.conferencelocationHasselt Belgium
imec.availabilityPublished - imec


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