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Implementation of Block Copolymer Based Directed Self-assembly for Advanced Lithography

dc.contributor.authorDoise, Jan
dc.date.accessioned2021-10-24T04:22:54Z
dc.date.available2021-10-24T04:22:54Z
dc.date.issued2017-11
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28263
dc.sourceIIOimport
dc.titleImplementation of Block Copolymer Based Directed Self-assembly for Advanced Lithography
dc.typePHD thesis
dc.contributor.imecauthorDoise, Jan
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorGroeseneken, Guido
dc.contributor.thesisadvisorGronheid, Roel
dc.identifier.urlhttps://limo.libis.be/primo-explore/fulldisplay?docid=LIRIAS1733284&context=L&vid=Lirias&search_scope=Lirias&tab=default_tab&lang=en_US&fromSitemap=1
imec.availabilityPublished - open access


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