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Low temperature deposition and characterization of high quality nanocrystalline diamond films for the fabrication of highly sensitive pressure sensing membrane

dc.contributor.authorDrijkoningen, Sien
dc.date.accessioned2021-10-24T04:27:28Z
dc.date.available2021-10-24T04:27:28Z
dc.date.issued2017-01
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28279
dc.sourceIIOimport
dc.titleLow temperature deposition and characterization of high quality nanocrystalline diamond films for the fabrication of highly sensitive pressure sensing membrane
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorHaenen, Ken
dc.contributor.thesisadvisorNesladek, Milos
dc.contributor.thesisadvisorJanssens, Stoffel
imec.availabilityPublished - open access


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