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Gettering and stimulating factors on the formation of SIMOX structures with thin dielectric layer: experiment and modelling

dc.contributor.authorRomanyuk, B. N.
dc.contributor.authorLitovchenko, V. G.
dc.contributor.authorEfremov, A. A.
dc.contributor.authorMel'nik, V. P.
dc.contributor.authorClaeys, C.
dc.date.accessioned2021-10-01T08:48:48Z
dc.date.available2021-10-01T08:48:48Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2911
dc.sourceIIOimport
dc.titleGettering and stimulating factors on the formation of SIMOX structures with thin dielectric layer: experiment and modelling
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conferenceNATO Advanced Research Workshop on "Perspectives, Sciences and Technologies of Novel Silicon-on-Insulator Devices"; 12-15 Octobe
dc.source.conferencelocation
imec.availabilityPublished - imec


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