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ALD as key enabler for CMOS technology

dc.contributor.authorVan Elshocht, Sven
dc.date.accessioned2021-10-26T06:49:52Z
dc.date.available2021-10-26T06:49:52Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32049
dc.sourceIIOimport
dc.titleALD as key enabler for CMOS technology
dc.typeProceedings paper
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.source.peerreviewno
dc.source.conferenceALD for Industry. 2nd Workshop and Tutorial
dc.source.conferencedate21/03/2018
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - imec


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