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Uncooled microbolometers for IR detection using surface micromachining of polySiGe

dc.contributor.authorDe Moor, Piet
dc.contributor.authorSedky, Sherif
dc.contributor.authorSabuncuoglu Tezcan, Deniz
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-06T10:56:34Z
dc.date.available2021-10-06T10:56:34Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3366
dc.sourceIIOimport
dc.titleUncooled microbolometers for IR detection using surface micromachining of polySiGe
dc.typeOral presentation
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.imecauthorSabuncuoglu Tezcan, Deniz
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.orcidimecSabuncuoglu Tezcan, Deniz::0000-0002-9237-7862
dc.source.peerreviewno
dc.source.conferenceLow Dimensional Structures and Devices - LDSD; 15-17 September 1999; Antalya, Turkey.
imec.availabilityPublished - imec


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