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Silicon photonic MEMS: Exploiting mechanics at the nanoscale to enhance photonic integrated circuits

dc.contributor.authorQuack, Niels
dc.contributor.authorSattari, Hamed
dc.contributor.authorTakabayashi, Alain Y.
dc.contributor.authorZhang, Yu
dc.contributor.authorEdinger, Pierre
dc.contributor.authorErrando-Herranz, Carlos
dc.contributor.authorGylfason, Kristinn
dc.contributor.authorWang, xiaojing
dc.contributor.authorNiklaus, Frank
dc.contributor.authorJezzini, Moises
dc.contributor.authorHwang, How Yuan
dc.contributor.authorO'Brien, Peter
dc.contributor.authorPorcel, Marco A.G.
dc.contributor.authorLerma Arce, Christina
dc.contributor.authorKumar, Saurav
dc.contributor.authorAbasahl, Banafsheh
dc.contributor.authorVerheyen, Peter
dc.contributor.authorBogaerts, Wim
dc.date.accessioned2021-10-27T16:31:38Z
dc.date.available2021-10-27T16:31:38Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33840
dc.sourceIIOimport
dc.titleSilicon photonic MEMS: Exploiting mechanics at the nanoscale to enhance photonic integrated circuits
dc.typeProceedings paper
dc.contributor.imecauthorKumar, Saurav
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageM2D.3
dc.source.conferenceOptical Fiber Communications Conference and Exhibition (OFC 2019)
dc.source.conferencedate3/03/2019
dc.source.conferencelocationSan Diego, CA USA
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8696652
imec.availabilityPublished - open access
imec.internalnotesISBN 978-1-9435-8053-8


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