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Optical micro-machined ultrasound sensors with a silicon photonic resonator in a buckled acoustical membrane

dc.contributor.authorWesterveld, Wouter
dc.contributor.authorLeinders, Suzanne
dc.contributor.authorvan Neer, Paul
dc.contributor.authorUrbach, Paul
dc.contributor.authorde Jong, Nico
dc.contributor.authorVerweij, Martin
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorRochus, Veronique
dc.date.accessioned2021-10-27T23:26:46Z
dc.date.available2021-10-27T23:26:46Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34436
dc.sourceIIOimport
dc.titleOptical micro-machined ultrasound sensors with a silicon photonic resonator in a buckled acoustical membrane
dc.typeProceedings paper
dc.contributor.imecauthorWesterveld, Wouter
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorRochus, Veronique
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage7
dc.source.conference20th Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems
dc.source.conferencedate24/03/2019
dc.source.conferencelocationHannover Germany
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8724528
imec.availabilityPublished - open access


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