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Internal stresses in aluminium interconnects

dc.contributor.authorSaerens, Annelies
dc.contributor.authorVan Houtte, P.
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-14T11:36:27Z
dc.date.available2021-10-14T11:36:27Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3789
dc.sourceIIOimport
dc.titleInternal stresses in aluminium interconnects
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conference5th European Conference on Residual Stress - ECRS5; 28-30 September 1999; Delft, The Netherlands.
dc.source.conferencelocation
imec.availabilityPublished - imec


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