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Oxygen in Czochralski silicon and its role in internal gettering

dc.contributor.authorBender, Hugo
dc.contributor.authorVanhellemont, Jan
dc.date.accessioned2021-09-29T12:39:47Z
dc.date.available2021-09-29T12:39:47Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37
dc.sourceIIOimport
dc.titleOxygen in Czochralski silicon and its role in internal gettering
dc.typeBook chapter
dc.contributor.imecauthorBender, Hugo
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1906
dc.source.bookEncyclopedia of Advanced Materials
dc.source.endpage1912
imec.availabilityPublished - open access


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