| dc.contributor.author | Zunic, Maja | |
| dc.contributor.author | Westerveld, Wouter | |
| dc.contributor.author | Gijsenbergh, Pieter | |
| dc.contributor.author | Jeong, Yongbin | |
| dc.contributor.author | Miranda, Alessio | |
| dc.contributor.author | O'Callaghan, John | |
| dc.contributor.author | Jafarpoorchekab, Hamideh | |
| dc.contributor.author | Vander Poorten, Emmanuel | |
| dc.contributor.author | Rottenberg, Xavier | |
| dc.contributor.author | Jansen, Roelof | |
| dc.contributor.author | Rochus, Veronique | |
| dc.date.accessioned | 2022-01-25T11:51:25Z | |
| dc.date.available | 2021-11-02T16:04:53Z | |
| dc.date.available | 2022-01-25T11:51:25Z | |
| dc.date.issued | 2020 | |
| dc.identifier.issn | na | |
| dc.identifier.other | WOS:000618046600011 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/38170.2 | |
| dc.source | WOS | |
| dc.title | Design of a micro-opto-mechanical ultrasound sensor for photoacoustic imaging | |
| dc.type | Proceedings paper | |
| dc.contributor.imecauthor | Zunic, Maja | |
| dc.contributor.imecauthor | Westerveld, Wouter | |
| dc.contributor.imecauthor | Gijsenbergh, Pieter | |
| dc.contributor.imecauthor | Jeong, Yongbin | |
| dc.contributor.imecauthor | Miranda, Alessio | |
| dc.contributor.imecauthor | O'Callaghan, John | |
| dc.contributor.imecauthor | Jafarpoorchekab, Hamideh | |
| dc.contributor.imecauthor | Rottenberg, Xavier | |
| dc.contributor.imecauthor | Jansen, Roelof | |
| dc.contributor.imecauthor | Rochus, Veronique | |
| dc.contributor.orcidext | Vander Poorten, Emmanuel::0000-0003-3764-9551 | |
| dc.contributor.orcidimec | Gijsenbergh, Pieter::0000-0003-0135-6968 | |
| dc.contributor.orcidimec | Jansen, Roelof::0000-0001-6685-4699 | |
| dc.contributor.orcidimec | Zunic, Maja::0000-0002-8350-1948 | |
| dc.contributor.orcidimec | Rochus, Veronique::0000-0001-9680-5724 | |
| dc.identifier.eisbn | 978-1-7281-6049-8 | |
| dc.source.numberofpages | 8 | |
| dc.source.peerreview | yes | |
| dc.source.conference | 21st International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) | |
| dc.source.conferencedate | JUL 05-08, 2020 | |
| dc.source.conferencelocation | Cracow | |
| dc.source.journal | na | |
| imec.availability | Published - imec | |