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Buried Power Rail Scaling and Metal Assessment for the 3 nm Node and Beyond

dc.contributor.authorGupta, Anshul
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorTao, Zheng
dc.contributor.authorMertens, Hans
dc.contributor.authorRadisic, Dunja
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorDevriendt, Katia
dc.contributor.authorHeylen, Nancy
dc.contributor.authorWang, Shouhua
dc.contributor.authorChehab, Bilal
dc.contributor.authorJang, Doyoung
dc.contributor.authorHellings, Geert
dc.contributor.authorSebaai, Farid
dc.contributor.authorLorant, Christophe
dc.contributor.authorTeugels, Lieve
dc.contributor.authorPeter, Antony
dc.contributor.authorChan, BT
dc.contributor.authorSchleicher, Filip
dc.contributor.authorDemonie, Ingrid
dc.contributor.authorMarien, Philippe
dc.contributor.authorSepulveda Marquez, Alfonso
dc.contributor.authorRichard, Olivier
dc.contributor.authorNagesh, Nishanth
dc.contributor.authorLesniewska, Alicja
dc.contributor.authorLazzarino, Frederic
dc.contributor.authorRyckaert, Julien
dc.contributor.authorMorin, Pierre
dc.contributor.authorAltamirano Sanchez, Efrain
dc.contributor.authorMurdoch, Gayle
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorDemuynck, Steven
dc.contributor.authorNa, Myung Hee
dc.contributor.authorTokei, Zsolt
dc.contributor.authorBiesemans, Serge
dc.contributor.authorDentoni Litta, Eugenio
dc.contributor.authorHoriguchi, Naoto
dc.date.accessioned2021-12-16T12:13:17Z
dc.date.available2021-12-06T02:06:16Z
dc.date.available2021-12-16T12:13:17Z
dc.date.issued2020
dc.identifier.issn2380-9248
dc.identifier.otherWOS:000717011600081
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38537.2
dc.sourceWOS
dc.titleBuried Power Rail Scaling and Metal Assessment for the 3 nm Node and Beyond
dc.typeProceedings paper
dc.contributor.imecauthorGupta, A.
dc.contributor.imecauthorPedreira, O. Varela
dc.contributor.imecauthorTao, Z.
dc.contributor.imecauthorMertens, H.
dc.contributor.imecauthorRadisic, D.
dc.contributor.imecauthorJourdan, N.
dc.contributor.imecauthorDevriendt, K.
dc.contributor.imecauthorHeylen, N.
dc.contributor.imecauthorWang, S.
dc.contributor.imecauthorChehab, B.
dc.contributor.imecauthorJang, D.
dc.contributor.imecauthorHellings, G.
dc.contributor.imecauthorSebaai, F.
dc.contributor.imecauthorLorant, C.
dc.contributor.imecauthorTeugels, L.
dc.contributor.imecauthorPeter, A.
dc.contributor.imecauthorChan, B. T.
dc.contributor.imecauthorSchleicher, F.
dc.contributor.imecauthorDemonie, I
dc.contributor.imecauthorMarien, P.
dc.contributor.imecauthorSepulveda, A.
dc.contributor.imecauthorRichard, O.
dc.contributor.imecauthorNagesh, N.
dc.contributor.imecauthorLesniewska, A.
dc.contributor.imecauthorLazzarino, F.
dc.contributor.imecauthorRyckaert, J.
dc.contributor.imecauthorMorin, P.
dc.contributor.imecauthorAltamirano-Sanchez, E.
dc.contributor.imecauthorMurdoch, G.
dc.contributor.imecauthorBOmmels, J.
dc.contributor.imecauthorDemuynck, S.
dc.contributor.imecauthorNa, M. H.
dc.contributor.imecauthorTokei, Z.
dc.contributor.imecauthorBiesemans, S.
dc.contributor.imecauthorLitta, E. Dentoni
dc.contributor.imecauthorHoriguchi, N.
dc.contributor.imecauthorGupta, Anshul
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorTao, Zheng
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorRadisic, Dunja
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorWang, Shouhua
dc.contributor.imecauthorChehab, Bilal
dc.contributor.imecauthorJang, Doyoung
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorSebaai, Farid
dc.contributor.imecauthorLorant, Christophe
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorPeter, Antony
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorSchleicher, Filip
dc.contributor.imecauthorDemonie, Ingrid
dc.contributor.imecauthorMarien, Philippe
dc.contributor.imecauthorSepulveda Marquez, Alfonso
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorNagesh, Nishanth
dc.contributor.imecauthorLesniewska, Alicja
dc.contributor.imecauthorLazzarino, Frederic
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorMorin, Pierre
dc.contributor.imecauthorAltamirano Sanchez, Efrain
dc.contributor.imecauthorMurdoch, Gayle
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorNa, Myung Hee
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.imecauthorDentoni Litta, Eugenio
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.contributor.orcidimecWang, Shouhua::0000-0002-9105-8552
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecLorant, Christophe::0000-0001-7363-9348
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecSchleicher, Filip::0000-0003-3630-7285
dc.contributor.orcidimecSepulveda Marquez, Alfonso::0000-0003-4726-177X
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecLesniewska, Alicja::0000-0003-3863-065X
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.contributor.orcidimecMorin, Pierre::0000-0002-4637-496X
dc.contributor.orcidimecDentoni Litta, Eugenio::0000-0003-0333-376X
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.identifier.doi10.1109/IEDM13553.2020.9371970
dc.identifier.eisbn978-1-7281-8888-1
dc.source.numberofpages4
dc.source.peerreviewyes
dc.source.conferenceIEEE International Electron Devices Meeting (IEDM)
dc.source.conferencedateDEC 12-18, 2020
dc.source.conferencelocationSan Francisco, CA, USA
dc.source.journalna
imec.availabilityPublished - imec


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220.500.12860/38537.2*2021-12-16T11:59:30Zvalidation by library/open access desk
120.500.12860/385372021-12-06T02:06:16Z

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