Notice

This item has not yet been validated by imec staff.

Notice

This is not the latest version of this item. The latest version can be found at: https://imec-prod.atmire.com/handle/20.500.12860/38547.2

Show simple item record

Inflection points in interconnect research and trends for 2nm and beyond in order to solve the RC bottleneck

dc.contributor.authorTokei, Zs
dc.contributor.authorVega, V.
dc.contributor.authorMurdoch, G.
dc.contributor.authorO'Toole, M.
dc.contributor.authorCroes, K.
dc.contributor.authorBaert, R.
dc.contributor.authorVan der Veen, M.
dc.contributor.authorAdelmann, C.
dc.contributor.authorSoulie, J. P.
dc.contributor.authorBoemmels, J.
dc.contributor.authorWilson, C.
dc.contributor.authorPark, S. H.
dc.contributor.authorSankaran, K.
dc.contributor.authorPourtois, G.
dc.contributor.authorSweerts, J.
dc.contributor.authorPaolillo, S.
dc.contributor.authorDecoster, S.
dc.contributor.authorMao, M.
dc.contributor.authorLazzarino, F.
dc.contributor.authorVersluijs, J.
dc.contributor.authorBlanco, V
dc.contributor.authorErcken, M.
dc.contributor.authorKesters, E.
dc.contributor.authorLe, Q-T
dc.contributor.authorHolsteyns, F.
dc.contributor.authorHeylen, N.
dc.contributor.authorTeugels, L.
dc.contributor.authorDevriendt, K.
dc.contributor.authorStruyf, H.
dc.contributor.authorMorin, P.
dc.contributor.authorJourdan, N.
dc.contributor.authorVan Elshocht, S.
dc.contributor.authorCiofi, I
dc.contributor.authorGupta, A.
dc.contributor.authorZahedmanesh, H.
dc.contributor.authorVanstreels, K.
dc.contributor.authorNa, M. H.
dc.date.accessioned2021-12-06T02:06:35Z
dc.date.available2021-12-06T02:06:35Z
dc.date.issued2020
dc.identifier.issn2380-9248
dc.identifier.otherWOS:000717011600015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38547
dc.sourceWOS
dc.titleInflection points in interconnect research and trends for 2nm and beyond in order to solve the RC bottleneck
dc.typeProceedings paper
dc.contributor.imecauthorTokei, Zs
dc.contributor.imecauthorVega, V.
dc.contributor.imecauthorMurdoch, G.
dc.contributor.imecauthorO'Toole, M.
dc.contributor.imecauthorCroes, K.
dc.contributor.imecauthorBaert, R.
dc.contributor.imecauthorVan der Veen, M.
dc.contributor.imecauthorAdelmann, C.
dc.contributor.imecauthorSoulie, J. P.
dc.contributor.imecauthorBoemmels, J.
dc.contributor.imecauthorWilson, C.
dc.contributor.imecauthorPark, S. H.
dc.contributor.imecauthorSankaran, K.
dc.contributor.imecauthorPourtois, G.
dc.contributor.imecauthorSweerts, J.
dc.contributor.imecauthorPaolillo, S.
dc.contributor.imecauthorDecoster, S.
dc.contributor.imecauthorMao, M.
dc.contributor.imecauthorLazzarino, F.
dc.contributor.imecauthorVersluijs, J.
dc.contributor.imecauthorBlanco, V
dc.contributor.imecauthorErcken, M.
dc.contributor.imecauthorKesters, E.
dc.contributor.imecauthorLe, Q-T
dc.contributor.imecauthorHolsteyns, F.
dc.contributor.imecauthorHeylen, N.
dc.contributor.imecauthorTeugels, L.
dc.contributor.imecauthorDevriendt, K.
dc.contributor.imecauthorStruyf, H.
dc.contributor.imecauthorMorin, P.
dc.contributor.imecauthorJourdan, N.
dc.contributor.imecauthorVan Elshocht, S.
dc.contributor.imecauthorCiofi, I
dc.contributor.imecauthorGupta, A.
dc.contributor.imecauthorZahedmanesh, H.
dc.contributor.imecauthorVanstreels, K.
dc.contributor.imecauthorNa, M. H.
dc.identifier.doi10.1109/IEDM13553.2020.9371903
dc.identifier.eisbn978-1-7281-8888-1
dc.source.numberofpages4
dc.source.peerreviewyes
dc.source.conferenceIEEE International Electron Devices Meeting (IEDM)
dc.source.conferencedateDEC 12-18, 2020
imec.availabilityUnder review


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record

Version history

VersionItemDateSummary
220.500.12860/38547.22021-12-21T12:57:31Zvalidation by library/open access desk
120.500.12860/38547*2021-12-06T02:06:35Z

*Selected version