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Wafer-scale integration of double gated WS2-transistors in 300mm Si CMOS fab

dc.contributor.authorAsselberghs, I
dc.contributor.authorSmets, Q.
dc.contributor.authorSchram, T.
dc.contributor.authorGroven, B.
dc.contributor.authorVerreck, D.
dc.contributor.authorAfzalian, A.
dc.contributor.authorArutchelvan, G.
dc.contributor.authorGaur, A.
dc.contributor.authorCott, D.
dc.contributor.authorMaurice, T.
dc.contributor.authorBrems, S.
dc.contributor.authorKennes, K.
dc.contributor.authorPhommahaxay, A.
dc.contributor.authorDupuy, E.
dc.contributor.authorRadisic, D.
dc.contributor.authorDe Marneffe, J-F
dc.contributor.authorThiam, A.
dc.contributor.authorLi, W.
dc.contributor.authorDevriendt, K.
dc.contributor.authorHuyghebaert, C.
dc.contributor.authorLin, D.
dc.contributor.authorCaymax, M.
dc.contributor.authorMorin, P.
dc.contributor.authorRadu, I. P.
dc.date.accessioned2021-12-06T02:06:35Z
dc.date.available2021-12-06T02:06:35Z
dc.date.issued2020
dc.identifier.issn2380-9248
dc.identifier.otherWOS:000717011600038
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38548
dc.sourceWOS
dc.titleWafer-scale integration of double gated WS2-transistors in 300mm Si CMOS fab
dc.typeProceedings paper
dc.contributor.imecauthorAsselberghs, I
dc.contributor.imecauthorSmets, Q.
dc.contributor.imecauthorSchram, T.
dc.contributor.imecauthorGroven, B.
dc.contributor.imecauthorVerreck, D.
dc.contributor.imecauthorAfzalian, A.
dc.contributor.imecauthorArutchelvan, G.
dc.contributor.imecauthorGaur, A.
dc.contributor.imecauthorCott, D.
dc.contributor.imecauthorMaurice, T.
dc.contributor.imecauthorBrems, S.
dc.contributor.imecauthorKennes, K.
dc.contributor.imecauthorPhommahaxay, A.
dc.contributor.imecauthorDupuy, E.
dc.contributor.imecauthorRadisic, D.
dc.contributor.imecauthorDe Marneffe, J-F
dc.contributor.imecauthorThiam, A.
dc.contributor.imecauthorLi, W.
dc.contributor.imecauthorDevriendt, K.
dc.contributor.imecauthorHuyghebaert, C.
dc.contributor.imecauthorLin, D.
dc.contributor.imecauthorCaymax, M.
dc.contributor.imecauthorMorin, P.
dc.contributor.imecauthorRadu, I. P.
dc.identifier.doi10.1109/IEDM13553.2020.9371926
dc.identifier.eisbn978-1-7281-8888-1
dc.source.numberofpages4
dc.source.peerreviewyes
dc.source.conferenceIEEE International Electron Devices Meeting (IEDM)
dc.source.conferencedateDEC 12-18, 2020
imec.availabilityUnder review


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220.500.12860/38548.22021-12-08T10:55:42Zvalidation by library/open access desk
120.500.12860/38548*2021-12-06T02:06:35Z

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