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EUV scattering from CNT pellicles: measurement and control

dc.contributor.authorPollentier, Ivan
dc.contributor.authorLuettgenau, Bernhard
dc.contributor.authorBrose, Sascha
dc.contributor.authorTimmermans, Marina
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorBrems, Steven
dc.contributor.authorGallagher, Emily
dc.date.accessioned2022-03-11T13:20:23Z
dc.date.available2022-03-11T13:20:23Z
dc.date.issued2021
dc.identifier.isbn978-1-5106-4051-1
dc.identifier.issn0277-786X
dc.identifier.otherWOS:000672825700023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39411
dc.sourceWOS
dc.titleEUV scattering from CNT pellicles: measurement and control
dc.typeProceedings paper
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.imecauthorTimmermans, Marina
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorBrems, Steven
dc.contributor.imecauthorGallagher, Emily
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.contributor.orcidimecBrems, Steven::0000-0002-0282-8528
dc.contributor.orcidimecTimmermans, Marina::0000-0001-9805-8259
dc.contributor.orcidimecGallagher, Emily::0000-0002-2927-8298
dc.identifier.doi10.1117/12.2584718
dc.identifier.eisbn978-1-5106-4052-8
dc.source.numberofpages9
dc.source.peerreviewyes
dc.source.beginpage1160911
dc.source.conferenceConference on Extreme Ultraviolet (EUV) Lithography XII
dc.source.conferencedateFEB 22-26, 2021
dc.source.conferencelocationVirtual
dc.source.journalProceedings of SPIE
dc.source.volume11609
imec.availabilityPublished - imec


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