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Channel Length Dependence of PBTI in High-k First RMG Gate Stack Integration Scheme

dc.contributor.authorParihar, Narendra
dc.contributor.authorArutchelvan, Goutham
dc.contributor.authorFranco, Jacopo
dc.contributor.authorBaudot, Sylvain
dc.contributor.authorOpdebeeck, Ann
dc.contributor.authorDemuynck, Steven
dc.contributor.authorArimura, Hiroaki
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorMitard, Jerome
dc.contributor.authorDe Heyn, Vincent
dc.contributor.authorMercha, Abdelkarim
dc.date.accessioned2022-05-06T09:50:28Z
dc.date.available2022-03-25T02:07:41Z
dc.date.available2022-05-05T08:30:17Z
dc.date.available2022-05-06T09:50:28Z
dc.date.issued2021
dc.identifier.issn1930-8841
dc.identifier.otherWOS:000764115800006
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39514.4
dc.sourceWOS
dc.titleChannel Length Dependence of PBTI in High-k First RMG Gate Stack Integration Scheme
dc.typeProceedings paper
dc.contributor.imecauthorParihar, Narendra
dc.contributor.imecauthorArutchelvan, Goutham
dc.contributor.imecauthorFranco, Jacopo
dc.contributor.imecauthorBaudot, Sylvain
dc.contributor.imecauthorOpdebeeck, Ann
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorArimura, Hiroaki
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorDe Heyn, Vincent
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.orcidimecFranco, Jacopo::0000-0002-7382-8605
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.identifier.doi10.1109/IIRW53245.2021.9635605
dc.identifier.eisbn978-1-6654-1794-5
dc.source.numberofpages4
dc.source.peerreviewyes
dc.source.beginpage29
dc.source.endpage32
dc.source.conferenceIEEE International Integrated Reliability Workshop (IIRW) / 4th Reliability Experts Forum
dc.source.conferencedateOCT 04-29, 2021
dc.source.conferencelocationFallen Leaf Lake, Lake Tahoe, California - US
dc.source.journalna
imec.availabilityPublished - imec


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420.500.12860/39514.4*2022-05-06T09:47:38Zvalidation by library/open access desk
320.500.12860/39514.32022-04-01T16:15:46Zvalidation by imec author
120.500.12860/395142022-03-25T02:07:41Z

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